Compression Ratio
N 2
>1 x 10 11
Ar
1 x 10 9
He
8.5 x 10 6
H 2
2.1 x 10 5
Interstage Pumping Speed (70 sccm gas load) ls -1
6
9
10
Backing/Interstage Port Size
NW16
Vent/Purge Port
Maximum Continuous Inlet flow N 2
Forced Air Cooled (35 oC ambient)
sccm
30
Forced Air Cooled (23 oC ambient)
60
Water Cooled (35 oC ambient)
50
Water Cooled (23 oC ambient)
Natural Convection (30 oC ambient)
Natural Convection (23 oC ambient)
25
Maximum Continuous Backing Pressure N 2
mbar
16
1
2
Start Time to 90% Speed (80 W)
sec
115
Nominal Rotational Speed
rpm
90,000
Gas
NW40
ISO63
CF63
ISO100
Inlet Pumping Speed ls -1
48
84
85
44
80
61
79
77
54
Pump Model
Mass
kg
3.0
2.9
4.3
3.2