ISO63 /CF63
Inlet Pumping Speed ls-1
N2
84
Ar
80
He
77
H2
54
Compression Ratio
>1 x 1011
3 x 109
4.6 x 107
6.5 x 105
Interstage Pumping Speed (70 sccm gas load) ls-1
6
9
10
Backing/Interstage Port Size
NW16
Vent/Purge Port
Maximum Continuous Inlet flow N2
Forced Air Cooled (35 oC ambient)
sccm
30
Forced Air Cooled (23 oC ambient)
60
Water Cooled (35 oC ambient)
50
Water Cooled (23 oC ambient)
Natural Convection (30 oC ambient)
Natural Convection (23 oC ambient)
25
Maximum Continuous Backing Pressure N2
mbar
16
1
2
Start Time to 90% Speed (80 W)
sec
115
Nominal Rotational Speed
rpm
90,000
Mass
kg
2.9
4.3